RESEARCH IN PROGRESS

Researcher: Dr. Allan Chasey

Program Development
Researcher: Dr. Allan Chasey

GIS and GPS Utility Locating

Green Fab – Developing sustainability concepts for Wafer Fabs to provide guidance on reducing the environmental impact of new and existing facilities. Teaming with SEMATECH and ISMI to develop LEED certification criteria and credits for semiconductor facilities.

ITRS Roadmap – Part of the Facilities Working Group in support of the Factory Integration Chapter for the ITRS Roadmap to determine the technical requirements for factories of the future linking the future technologies with the infrastructure to support improved manufacturing.

FIATECH – Future capital facilities will be programmed, designed and constructed to be an intelligent integrated system of systems. These intelligent system s will utilize the data flow from self monitored equipment and systems to manage the actions necessary to ensure conditions and performance necessary to enable safe, secure and continuously optimized facility operations. Facility systems will be integrated to utilize data to automatically and autonomously activate built-in mechanisms to perform required maintenance and/or repair functions.

Design for Facilities –  Working to develop SEMI (Semiconductor Equipment Manufactures International) Facility Guidelines for interfacing production equipment and facility support systems to make the production equipment designers aware of the issues and the impact of tool design decisions on the facility and facility infrastructure. Proper equipment design will ultimately reduce facility related costs and environmental impact of the tool and facility.