| Facility Research Opportunity | Design Tools |
| Research Program | New Construction / Retrofit |
| Proposed Research Title | Standards and Codes for Wafer Fab Design and Construction (Continuation of Standards and Codes 1999-2000) |
| Background | In the past ten years, the amount of information that is available in the form of recognized standards supporting the semiconductor wafer fab projects has increased tenfold. SEMI and SIA within the Semiconductor Industry has developed an extensive body of best known knowledge, the IEST has expanded its Recommended Practices and ISO is now developing international standards for contamination control and operations for the cleanroom industries. Engineering and Construction industry organizations such as ASTM and ASHRAE have developed new standards directly applicable to semiconductor projects. The UBC, BOCA, and Southern Building Codes are being combined into a newly written International Building Code. The new codes, NFPA, and EPA standards provide guidance and mandates for use on facilities and sites. The magnitude of information available is significant and has not been cataloged or identified with interrelationships in any one location or by any individual company. |
| Proposal | The research would continue to identify, specify and catalog all existing standards that are written that directly apply to semiconductor facilities. In most cases, the research would provide an executive summary of the documents, where they could be obtained, and the areas of use. In some cases, the standards would receive critical evaluation and researchers would define when they should or should not be used. During this project, company or vendor "standards" will also be identified, with definition on whether these are proprietary to a company or in general use. |
| Deliverables | A web-based program from the previous research will continue to be updated and improved to make the support tool more valuable for CREATE members. |
| Support Required | Representatives of Designers, Constructors, and Owners will identify common standards in use and examples of their use. Industry Organizations should provide researchers with copies of standards and contact for standards interpretation. |
| Benefit | Owners, Contractors, and Designers will all benefit extensively by early identification of mandatory and preferred standards that will be used in a project. |
| Schedule | 1 October, 2000 to 31 December, 2001 |
| Proposed Researcher | Dr. A Chasey |
| CREATE Technical Advisory Committee |
Intel, IDC, Arnold Canales, Dave Jones, Abbie Gregg, Ken Goldstein, Bill Acorn |
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